The LLS is a sub system for machine builders to incorporate into their new direct imaging lithography machines. The system comes with a detailed documented interface and on-site support for easy integration into the machine base and machine SW.
The LLS comes in four versions: LLS04, LLS10, LLS25 and LLS50 with line/space/dam capabilities of 4um, 10 um, 25 um and 50 um.
The LLS04 comes with a high power 405 nm Laser diode light source, while the other three version of the LLS Photo Heads comes with a very powerful and compact multi LED light source covering the range from 350 – 440 nm. The power level meets the state of the art requirements for high throughput machines.
The LLS04 supports a Direct Imaging machine with capabilities of 4 um line/space
The LLS10 supports a Direct Imaging machine with capabilities of 10 um line/space.
The LLS25 supports a Direct Imaging machine with capabilities of 25 um line/space.
The LLS50 will support a Direct Imaging machine with capabilities of 50 um line/space.
High throughput capability
The high UV power in the image in combination with high data throughput, real time image processing and high frame rate DLP technology is capable of supporting machine configurations with state of the art throughput.
10 GBit Ethernet lines
The exposure job is stored in the photo head prior to start of a production batch. Multiple jobs can be stored at the same time. This is an advantage compared to systems which load data to the photo head continously while exposing. Hence, potential image data transfer errors and time consuming retransmissions are eliminated. The LLS photo head does all the real time processing (warping ,scaling etc) internally. Nevertheless the LLS has a high speed 10Gbit interface for loading compressed data into the photo head. The result is that new jobs are loaded very fast.
Processing and real time scaling and warping
The LLS converts Gerber and ODB++ artwork data in an offline PC SW application as a part of the LLS
The processed data for new panel job(s) is transferred to the photo heads within seconds. The scaling and warping according to the selected “recipe” is done in real time, while printing, with start of printing only after a few tenths of a second after the registration data is availableThis supports highly automated multi-table solutions where registration can be done in parallel with printing, enabling state of the art throughput.
Autofocus and tracking
Due to panels not being completely flat, Visitech has developed a real time autofocus and tracking system with a Z motion reference design. The autofocus functionality will enable flawless printing on panels that are not flat. Two modes of autofocus modes are supported to cope with inner layer, outer layer and soldermask applications.
Furthermore, the z-axis reference design comes in 2 versions depending on the need for accuracy and speed along the z-axis.
Low maintenance cost
DLP, LED technology and laser diodes as light source provides a system with long lifetime and very low maintenance cost compared to conventional lasers.
Multi UV LED light source
The LLS50, LLS25 and LLS10 includes a multi UV LED light source with a range from 350 nm to 440 nm with high UV energy output in combination with high depth of focus. This enables the LLS to be used in inner / outer layer as well as for solder mask application.
Laser diode light source
The LLS04 comes with a high power 405 nm laser diode light source.
Fast and easy light source replacement LED / Laser “SWAP & GO” with auto calibration
The multi LED / Laser light source moduel can be extracted easily from the photo head to be placed on a maintenance desk for easy LED / Laser module SWAP by the end user operator. The LED / Laser module contains measured LED / Laser data such that after replacement the system will automatically self-calibrate. This ensures that all photo heads have equal power per wavelength at all times.
This function enables the machine end user to exchange light source without having to wait for service personnel coming to site.
The LLS is based on the patented optical multiplexing technology, creating the optical performance and environment that enables sub-pixelation (SPX) during motion.
Pixel power control
The image from the LLS photo head will go through the Pixel Power Control (PPC), making sure that every subpixel in the resin will «receive» the same amount of UV power.
The optical multiplexing and high resolution in the LLS is challenging optical performance and assembly. Visitech has developed assembly techniques enabling optical element assembly with um accuracy.
Our reference LLS lithography stages / machines are available for demonstration and test exposure of PCB/wafer (and other materials) samples for evaluation of performance and throughput.
(*) Patented and patents pending.